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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever
Resnick, Douglas J., Bencher, Christopher, Kaestner, Marcus, Nieradka, Konrad, Ivanov, Tzvetan, Lenk, Steve, Krivoshapkina, Yana, Ahmad, Ahmad, Angelov, Tihomir, Guliyev, Elshad, Reum, Alexander, BuddVolume:
9049
Année:
2014
Langue:
english
DOI:
10.1117/12.2046973
Fichier:
PDF, 1.24 MB
english, 2014