Deep lateral anhydrous HF/methanol etching for MEMS release processes
Erdamar, MeltemVolume:
7
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2959177
Date:
July, 2008
Fichier:
PDF, 230 KB
english, 2008