
[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Impact of Confinement and Stress on the Subband Parameters in Ultra-Thin Silicon Films
Sverdlov, Viktor A., Baumgartner, Oskar, Windbacher, Thomas, Schanovsky, Franz, Selberherr, SiegfriedAnnée:
2009
Langue:
english
DOI:
10.1149/1.3183743
Fichier:
PDF, 356 KB
english, 2009