Composite plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyimide
M. Drabik, J. Kousal, Y. Pihosh, A. Choukourov, H. Biederman, D. Slavinska, A. Mackova, A. Boldyreva, J. PesickaVolume:
81
Année:
2007
Langue:
english
Pages:
8
DOI:
10.1016/j.vacuum.2006.10.013
Fichier:
PDF, 899 KB
english, 2007