ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Study of Cu Bimetallic Corrosion in CMP Chemical Environments Using Optical Scanning and Micropattern Corrosion Screening
Yu, Kyle, Thomas, Nicole, Venkataraman, Shyam S., Pillai, Karthikeyan S., Hurd, Trace, Boggs, Karl, Chyan, OliverAnnée:
2011
Langue:
english
DOI:
10.1149/1.3567749
Fichier:
PDF, 787 KB
english, 2011