Epitaxial Layers Grown with HCl Addition: A Comparison with the Standard Process
La Via, Francesco, Galvagno, G., Firrincieli, A., Roccaforte, Fabrizio, Di Franco, Salvatore, Ruggiero, Alfonso, Barbera, Milo, Reitano, Ricardo, Musumeci, Paolo, Calcagno, Lucia, Foti, Gaetano, MauceVolume:
527-529
Année:
2006
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.163
Fichier:
PDF, 293 KB
english, 2006
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