
Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators
Laurent Broch, Aotmane En Naciri, Luc JohannVolume:
519
Année:
2011
Langue:
english
Pages:
3
DOI:
10.1016/j.tsf.2010.12.046
Fichier:
PDF, 140 KB
english, 2011