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Low friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
J. Paulitsch, M. Schenkel, A. Schintlmeister, H. Hutter, P.H. MayrhoferVolume:
518
Année:
2010
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.05.061
Fichier:
PDF, 990 KB
english, 2010