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Characterization of silicon oxide gas barrier films with controlling to the ion current density (ion flux) by plasma enhanced chemical vapor deposition
Su B. Jin, Youn J. Kim, Yoon S. Choi, In S. Choi, Jeon G. HanVolume:
518
Année:
2010
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.03.134
Fichier:
PDF, 824 KB
english, 2010