Deposition damage evaluation of fluorine doped silicon oxide using simple damage monitoring system
Dong-Hwan Kim, Beomjun Kim, Jeongyun Lee, Joon-Tae SongVolume:
518
Année:
2010
Langue:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.02.046
Fichier:
PDF, 1.65 MB
english, 2010