ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
Greenslit, Daniel V., Eisenbraun, EricAnnée:
2011
Langue:
english
DOI:
10.1149/1.3646496
Fichier:
PDF, 797 KB
english, 2011