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The photoluminescence of SiCN thin films prepared by C+ implantation into α-SiNx:H
Yuzhen Liu, Xia Zhang, Chao Chen, Guobin Zhang, Pengshou Xu, Dapeng Chen, Lijun DongVolume:
518
Année:
2010
Langue:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.01.028
Fichier:
PDF, 752 KB
english, 2010