Advanced key technologies for magnetron sputtering and PECVD of inorganic and hybrid transparent coatings
Peter Frach, Daniel Gloess, Hagen Bartzsch, Kerstin Taeschner, Joern Liebig, Eberhard SchultheissVolume:
518
Année:
2010
Langue:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.192
Fichier:
PDF, 672 KB
english, 2010