Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems
Kento Hirohata, Yasutaka Nishi, Naoki Tsukamoto, Nobuto Oka, Yasushi Sato, Isao Yamamoto, Yuzo ShigesatoVolume:
518
Année:
2010
Langue:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.177
Fichier:
PDF, 696 KB
english, 2010