A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases
Hao Lei, Keisuke Ichikawa, Yoichi Hoshi, Meihan Wang, Takayuki Uchida, Yutaka SawadaVolume:
518
Année:
2010
Langue:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.08.059
Fichier:
PDF, 433 KB
english, 2010