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High-temperature stability of the mechanical and optical properties of Si–B–C–N films prepared by magnetron sputtering
J. Kalaš, R. Vernhes, S. Hřeben, J. Vlček, J.E. Klemberg-Sapieha, L. MartinuVolume:
518
Année:
2009
Langue:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.06.017
Fichier:
PDF, 523 KB
english, 2009