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Electrical and optical properties of Al-doped ZnO films deposited by hollow cathode gas flow sputtering
Hiroshi Takeda, Yasushi Sato, Yoshinori Iwabuchi, Masato Yoshikawa, Yuzo ShigesatoVolume:
517
Année:
2009
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.11.114
Fichier:
PDF, 1.15 MB
english, 2009