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Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC
Pernot, Julien, Bluet, Jean Marie, Camassel, Jean, Di Cioccio, LeaVolume:
353-356
Année:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.385
Fichier:
PDF, 360 KB
2001