
Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction
M. Serényi, T. Lohner, P. Petrik, Z. Zolnai, Z.E. Horváth, N.Q. KhánhVolume:
516
Année:
2008
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2008.04.070
Fichier:
PDF, 473 KB
english, 2008