A new way to selectively remove Si islands from polycrystalline silicon seed layers made by aluminum-induced crystallization
Dries Van Gestel, Ivan Gordon, Agnes Verbist, Lodewijk Carnel, Guy Beaucarne, Jef PoortmansVolume:
516
Année:
2008
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.12.122
Fichier:
PDF, 916 KB
english, 2008