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Effects of ion implantation on the microstructure and residual stress of filter arc CrN films
Ko-Wei Weng, Ya-Chi Chen, Sheng Han, Chih-Sheng Hsu, Yung-Lin Chen, Da-Yung WangVolume:
516
Année:
2008
Langue:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.07.088
Fichier:
PDF, 759 KB
english, 2008