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Formation of gas barrier films by Cat-CVD method using organic silicon compounds
Takuya Oyaidu, Yohei Ogawa, Kazuhiko Tsurumaki, Keisuke Ohdaira, Hideki MatsumuraVolume:
516
Année:
2008
Langue:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.06.214
Fichier:
PDF, 459 KB
english, 2008