Plasma CVD reactor with two-microwave oscillators for diamond film synthesis
M. Nagatsu, M. Miyake, J. MaedaVolume:
506-507
Année:
2006
Langue:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.041
Fichier:
PDF, 302 KB
english, 2006