
Effects of pretreatment by ion implantation and interlayer on adhesion between aluminum substrate and TiN film
Youming Liu, Liuhe Li, Xun Cai, Qiulong Chen, Ming Xu, Yawei Hu, Tik-Lam Cheung, C.H. Shek, Paul K. ChuVolume:
493
Année:
2005
Langue:
english
Pages:
8
DOI:
10.1016/j.tsf.2005.06.045
Fichier:
PDF, 485 KB
english, 2005