Numerical investigation for nano-particle synthesis in an RF inductively coupled plasma
Masaya Shigeta, Takayuki Watanabe, Hideya NishiyamaVolume:
457
Année:
2004
Langue:
english
Pages:
9
DOI:
10.1016/j.tsf.2003.12.020
Fichier:
PDF, 357 KB
english, 2004