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ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Study on Surface State Control Technique of InSb Material Ultraprecision Machining
Niu, Xinhuan, Tan, Baimei, Xu, Wenzhong, Zhao, Haitao, Liu, YulingAnnée:
2010
Langue:
english
DOI:
10.1149/1.3360692
Fichier:
PDF, 239 KB
english, 2010