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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Impact of Film Stress on Nanoidentation Fracture Toughness Measurements for PECVD SiNx:H Films
King, Sean, Chu, R., Xu, Jessica, Huening, JenniferAnnée:
2009
Langue:
english
DOI:
10.1149/1.3122109
Fichier:
PDF, 205 KB
english, 2009