[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Cu-CMP Engineering Challenges for the 65 nm Technology Nodes and Beyond
Petitdidier, Sebastien, Mellier, Maxime, Guiheux, Denis, Juhel, MarcVolume:
11
Année:
2007
Langue:
english
DOI:
10.1149/1.2779407
Fichier:
PDF, 705 KB
english, 2007