Elimination of Twin Boundaries when Growing 3C-SiC Heteroepitaxial by Vapour-Liquid-Solid Mechanism on Patterned 4H-SiC Substrate
Lorenzzi, Jean, Jegenyes, Nikoletta, Lazar, Mihai, Tournier, Dominique, Carole, Davy, Cauwet, François, Ferro, GabrielVolume:
711
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.711.11
Date:
January, 2012
Fichier:
PDF, 9.87 MB
english, 2012