Repair of Porous Methylsilsesquioxane Films using Supercritical Carbon Dioxide
Xie, Bo, Muscat, Anthony J.Volume:
812
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-812-F1.4
Date:
January, 2004
Fichier:
PDF, 112 KB
english, 2004