Oblique-Angle Sputtering Effects on Characteristics of Nanocolumnar Structure Anisotropic Indium Tin Oxide Films
Chen, Lung-Chien, Chen, Cheng-Chiang, Sung, Yen-Tang, Hsu, Ya-YingVolume:
156
Année:
2009
Langue:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3116248
Fichier:
PDF, 379 KB
english, 2009