ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Opportunities and Challenges of FinFET as a Device Structure Candidate for 14nm Node CMOS Technology
Yamashita, Tenko, Basker, Veeraraghavan, Standaert, Theodorus, Yeh, Chun-Chen, Faltermeier, Johnathan, Yamamoto, Toyoji, Lin, Chung-hsun, Bryant, Andres, Maitra, Kingsuk, Kulkarni, Pranita, KanakasabaAnnée:
2011
Langue:
english
DOI:
10.1149/1.3567563
Fichier:
PDF, 507 KB
english, 2011
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