[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Thermally Stable Hf-silicate with Modification of Si Doping and Thermal Budget in MIM Capacitors
Tzeng, Pei-Jer, Wu, Tai-Yuan, Wang, Ching-Chiun, Lin, Cha-Hsin, Lee, Lurng-Shehng, Tsai, Ming-JinVolume:
16
Année:
2008
Langue:
english
DOI:
10.1149/1.2981613
Fichier:
PDF, 270 KB
english, 2008