
Residual stress control in MoCr thin films deposited by ionized magnetron sputtering
J. Tranchant, B. Angleraud, P.Y. Tessier, M.P. Besland, J.P. Landesman, M.A. DjouadiVolume:
200
Année:
2006
Langue:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.11.104
Fichier:
PDF, 212 KB
english, 2006