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Plasma cleaning of “endless” substrates by use of a tandem dielectric barrier discharge
M. Teschke, D. Korzec, E.G. Finantu-Dinu, J. EngemannVolume:
200
Année:
2005
Langue:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.02.179
Fichier:
PDF, 279 KB
english, 2005