The thickness uniformity of films deposited by magnetron sputtering with rotation and revolution
Chunlin Fu, Chuanren Yang, Leigang Han, Hongwei ChenVolume:
200
Année:
2006
Langue:
english
Pages:
3
DOI:
10.1016/j.surfcoat.2004.12.023
Fichier:
PDF, 116 KB
english, 2006