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Electrical characteristics of SiGe channel MOS devices with high-k/metal gate incorporated with nitrogen by plasma immersion ion implantation
Chung-Hao Fu, Kuei-Shu Chang-Liao, Li-We Du, Tien-Ko Wang, W.F. Tsai, C.F. AiVolume:
54
Année:
2010
Langue:
english
Pages:
4
DOI:
10.1016/j.sse.2010.05.040
Fichier:
PDF, 752 KB
english, 2010