SEM, Dielectric, Pyroelectric, and Piezoelectric Response of Thin Epitaxial AlN Films Grown on SiC/Si Substrate
Sergeeva, O. N., Bogomolov, A. A., Solnyshkin, A. V., Komarov, N. V., Kukushkin, S. A., Krasovitsky, D. M., Dudin, A. L., Kiselev, D. A., Ksenich, S. V., Senkevich, S. V., Kaptelov, E. Yu., Pronin, I.Volume:
477
Langue:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150193.2015.1000144
Date:
March, 2015
Fichier:
PDF, 634 KB
english, 2015