Influence of Sputtering Power on the Structure, Optical and Electric Properties of Cu3N Films
Chen, Li Na, Leng, Jin Feng, Yang, Zhong Xi, Meng, Zhi Chao, Sun, BinVolume:
814
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.814.596
Date:
March, 2015
Fichier:
PDF, 554 KB
english, 2015