Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy
Demura, Kazuya, Hirose, Satoru, Ihara, TohruVolume:
126-128
Langue:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.126-128.835
Date:
August, 2010
Fichier:
PDF, 829 KB
english, 2010