Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation
Kamata, Isaho, Tsuchida, Hidekazu, Jikimoto, Tamotsu, Izumi, KunikazaVolume:
206-207
Année:
2002
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.206-207.111
Fichier:
PDF, 405 KB
2002