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Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester
Zhanshe Guo, Yonggang Meng, Hao Wu, Caijun Su, Shizhu WenVolume:
135
Année:
2007
Langue:
english
Pages:
7
DOI:
10.1016/j.sna.2006.10.008
Fichier:
PDF, 738 KB
english, 2007