SiCN ceramic patterns fabricated by soft lithography techniques
Dong-Hoon Lee, Kyoung-Hoon Park, Lan-Young Hong, Dong-Pyo KimVolume:
135
Année:
2007
Langue:
english
Pages:
7
DOI:
10.1016/j.sna.2006.09.003
Fichier:
PDF, 1.40 MB
english, 2007