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Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model
Tao Jiang, Anlin Wang, Jiwei Jiao, Guangjun LiuVolume:
128
Année:
2006
Langue:
english
Pages:
8
DOI:
10.1016/j.sna.2006.01.007
Fichier:
PDF, 504 KB
english, 2006