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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - The electromechanical response of a self-excited MEMS Franklin oscillator
Shmulevich, Shai, Hotzen, Inbar, Elata, DavidAnnée:
2015
Langue:
english
DOI:
10.1109/MEMSYS.2015.7050881
Fichier:
PDF, 700 KB
english, 2015