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A z-axis differential capacitive SOI accelerometer with vertical comb electrodes
Toshiyuki Tsuchiya, Hirofumi FunabashiVolume:
116
Année:
2004
Langue:
english
Pages:
6
DOI:
10.1016/j.sna.2004.05.008
Fichier:
PDF, 539 KB
english, 2004