Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 5
Discrepancies in the nature of nitrogen incorporation in dilute-nitride GaSbN and GaAsN films
Sarney, Wendy L., Svensson, Stefan P.Volume:
31
Année:
2013
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4819303
Fichier:
PDF, 803 KB
english, 2013