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Growth and Characterisation of Heavily Al-Doped 4H-SiC Layers Grown by VLS in an Al-Si Melt
Jacquier, Christophe, Ferro, Gabriel, Balloud, Carole, Zielinski, Marcin, Camassel, Jean, Polychroniadis, E.K., Stoemenos, J., Cauwet, François, Monteil, YvesVolume:
457-460
Année:
2004
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.735
Fichier:
PDF, 817 KB
english, 2004