Single-Wafer Hot Wall Rapid Thermal Processing for Thin Gate Oxide Films
Senzaki, Yoshihide, Schaefer, Marci, Sisson, Joseph, Barelli, Carl, Bailey, Jeff, Herring, Robert, Hayn, ReginaVolume:
5
Année:
2002
Langue:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1461998
Fichier:
PDF, 176 KB
english, 2002