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Comparison of Propagation and Nucleation of Basal Plane Dislocations in 4H-SiC(000-1) and (0001) Epitaxy
Tsuchida, Hidekazu, Kamata, Isaho, Miyanagi, Toshiyuki, Nakamura, Tomonori, Nakayama, Koji, Ishii, R., Sugawara, YoshitakaVolume:
527-529
Année:
2006
Langue:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.231
Fichier:
PDF, 3.12 MB
english, 2006